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1

Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas

Hidemitsu Aoki, Takuro Masuzumi, Makoto Hara, Daisuke Watanabe, Chiharu Kimura, Takashi Sugino

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 353 KB

english, 2010

2

Characterization of boron carbon nitride film for humidity sensor

Aoki, Hidemitsu, Shima, Hidekazu, Kimura, Chiharu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2007

Language:

english

File:

PDF, 429 KB

english, 2007

3

Surface properties and field emission of boron nitride

Sugino, Takashi, Kimura, Chiharu, Aoki, Hidemitsu

Journal:

Diamond and Related Materials

Year:

2008

Language:

english

File:

PDF, 1006 KB

english, 2008

4

Influence of oxygen plasma treatment on properties of Methyl-BCN film

Lu, Zhiming, Hara, Makoto, Masuzumi, Takuro, Nishizaki, Makoto, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2011

Language:

english

File:

PDF, 860 KB

english, 2011

5

Effects of Elevated CO2 Concentration on Photosynthetic Carbon Metabolism in Flag-Leaf Blades of Rice before and after Heading

Aoki, Naohiro, Ono, Kiyomi, Sasaki, Haruto, Seneweera, Saman P., Sakai, Hidemitsu, Kobayashi, Kazuhiko, Ishimaru, Ken

Journal:

Plant Production Science

Year:

2003

Language:

english

File:

PDF, 843 KB

english, 2003

6

Laser-induced chemical vapour deposition and characterization of amorphous silicon oxide films

Junji Shirafuji, Satoru Miyoshi, Hidemitsu Aoki

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 595 KB

english, 1988

7

Atomic bonds in boron carbon nitride films synthesized by remote plasma-assisted chemical vapor deposition

Kimura, Chiharu, Sota, Hiroshi, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2009

Language:

english

File:

PDF, 588 KB

english, 2009

8

Influence of the methyl group on the dielectric constant of boron carbon nitride films containing it

Aoki, Hidemitsu, Masuzumi, Takuro, Hara, Makoto, Lu, Zhiming, Watanebe, Daisuke, Kimura, Chiharu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2010

Language:

english

File:

PDF, 551 KB

english, 2010

9

Optical and electrical properties of boron nitride oxide films

Sota, Hiroshi, Komatsu, Naoyoshi, Chikamatsu, Kentaro, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2008

Language:

english

File:

PDF, 418 KB

english, 2008

10

High selectivity (SiN/SiO2) etching using an organic solution containing anhydrous HF

Daisuke Watanabe, Hidemitsu Aoki, Mitsushi Itano, Takeshi Kezuka, Chiharu Kimura, Takashi Sugino

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 327 KB

english, 2009

11

Dry etching properties of boron carbon nitride (BCN) films using carbon fluoride gas

Aoki, Hidemitsu, Tokuyama, Shinji, Sasada, Takashi, Watanabe, Daisuke, Mazumder, M.K., Kimura, Chiharu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2008

Language:

english

File:

PDF, 804 KB

english, 2008

12

Influence of moisture on BCN (low-K) film for interconnection reliability

Aoki, Hidemitsu, Watanabe, Daisuke, Moriyama, Ryota, Mazumder, M.K., Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2008

Language:

english

File:

PDF, 383 KB

english, 2008

13

Synthesis of methyl boron nitride film as low-k insulating film for LSI interconnection

Aoki, Hidemitsu, Tokuyama, Shinji, Masuzumi, Takuro, Hara, Makoto, Mazumder, Motaharu Kabir, Watanabe, Daisuke, Kimura, Chiharu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2009

Language:

english

File:

PDF, 577 KB

english, 2009

14

Improved tunneling controlled field emission of Boron carbon nitride nanofilm

Sugino, Takashi, Kikuchi, Junichi, Kawai, Satoshi, Kimura, Chiharu, Aoki, Hidemitsu

Journal:

Diamond and Related Materials

Year:

2010

Language:

english

File:

PDF, 272 KB

english, 2010

15

Influence of atomic bonds on electrical property of boron carbon nitride films synthesized by remote plasma-assisted chemical vapor deposition

Sota, Hiroshi, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2010

Language:

english

File:

PDF, 757 KB

english, 2010

16

Electrochemical Etching of Ru Film for Bevel Cleaning of Back End of Line

Aoki, Hidemitsu, Watanabe, Daisuke, Ooi, Naoki, Jong-Hyeon, Jeong, Kimura, Chiharu, Sugino, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 131 KB

english, 2009

17

Improved field emission characteristics of carbon nanofiber treated with nitrogen plasma

Kimura, Chiharu, Yamamuro, Yutaka, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2007

Language:

english

File:

PDF, 417 KB

english, 2007

18

Dry etching properties of methyl-BCN film with C4F8 gas for Cu/low-k interconnection

Aoki, Hidemitsu, Hara, Makoto, Masuzumi, Takuroh, Ahmed, Farid, Kimura, Chiharu, Sugino, Takashi

Journal:

Diamond and Related Materials

Year:

2010

Language:

english

File:

PDF, 524 KB

english, 2010

19

Accuracy of linear-array EUS for preoperative staging of gastric cardia cancer

Shouji Shimoyama, Hidemitsu Yasuda, Masanori Hashimoto, Yusuke Tatsutomi, Fumio Aoki, Ken-ichi Mafune, Michio Kaminishi

Journal:

Gastrointestinal Endoscopy

Year:

2004

Language:

english

File:

PDF, 211 KB

english, 2004

20

Suppression of Cu Oxidation Using Environmentally Friendly Inhibitors under Conditions of High Temperature and High Humidity for Cu/Low- k

Hara, Makoto, Watanabe, Daisuke, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 126 KB

english, 2009

21

Study of Submicron SrTiO 3 Patterning

Aoki, Hidemitsu, Hashimoto, Toshiki, Ikawa, Eiji, Kikkawa, Takamaro, Takeuchi, Kiyoshi, Yamamichi, Shintaro, Sakuma, Toshiyuki, Miyasaka, Yoichi

Journal:

Japanese Journal of Applied Physics

Year:

1993

File:

PDF, 898 KB

1993

22

Properties of P(VDF-TeFE) thin film formed by annealing process with electric field

Jeong, Jong-Hyeon, Kimura, Chiharu, Aoki, Hidemitsu, Okuyama, Masanori, Sugino, Takashi

Journal:

MRS Proceedings

Year:

2009

Language:

english

File:

PDF, 201 KB

english, 2009

23

Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication

Mochizuki, Masaya, Kitabayashi, Yuta, Nakajima, Tomoya, Satoi, Daiki, Ishikawa, Fumitaro, Kondow, Masahiko, Hara, Makoto, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 940 KB

english, 2011

24

Characterization of boron carbon nitride film modified by excimer laser annealing

Hidemitsu Aoki, Kazutoshi Ohyama, Hiroshi Sota, Toshiaki Seino, Chiharu Kimura, Takashi Sugino

Journal:

Applied Surface Science

Year:

2007

Language:

english

File:

PDF, 363 KB

english, 2007

25

Influence of oxygen plasma treatment on boron carbon nitride film composition

Hidemitsu Aoki, Takuro Masuzumi, Daisuke Watanabe, M.K. Mazumder, Hiroshi Sota, Chiharu Kimura, Takashi Sugino

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 620 KB

english, 2009

26

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Evaluation of Solid Ammonium Formate Oxidation for PEM Fuel Cells

Ohyama, Kazutoshi, Kimura, Chiharu, Aoki, Hidemitsu, Kuwabata, Susumu, Sugino, Takashi

Year:

2007

Language:

english

File:

PDF, 201 KB

english, 2007

27

After-Corrosion Suppression Using Low-Temperature Al-Si-Cu Etching

Aoki, Hidemitsu, Ikawa, Eiji, Kikkawa, Takamaro, Teraoka, Yuden, Nishiyama, Iwao

Journal:

Japanese Journal of Applied Physics

Year:

1991

Language:

english

File:

PDF, 355 KB

english, 1991

28

Dependence of Residual Chlorine Amount on Al Grain Size

Aoki, Hidemitsu, Ikawa, Eiji, Kikkawa, Takamaro, Teraoka, Yuden, Nishiyama, Iwao

Journal:

Japanese Journal of Applied Physics

Year:

1992

Language:

english

File:

PDF, 593 KB

english, 1992

29

Influence of inserting AlN between AlSiON and 4H–SiC interface for the MIS structure

Naoyoshi Komatsu, Tomohisa Satoh, Masatomo Honjo, Takashi Futatuki, Keiko Masumoto, Chiharu Kimura, Hidemitsu Aoki

Journal:

Applied Surface Science

Year:

2011

Language:

english

File:

PDF, 690 KB

english, 2011

30

Annealing effect on photoluminescence of Tb-doped AlBON films

Keiko Masumoto, Chiharu Kimura, Hidemitsu Aoki, Takashi Sugino

Journal:

Solid State Communications

Year:

2010

Language:

english

File:

PDF, 666 KB

english, 2010

31

Properties of Methyl Boron Nitride Film for Next Generation Low- k Interconnection

Tokuyama, Shinji, Hara, Makoto, Mazumder, Motaharu Kabir, Watanabe, Daisuke, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 210 KB

english, 2008

32

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Corrosion Suppression During Wet Processes in FEOL and BEOL for 45nm Node and Beyond

Aoki, Hidemitsu, Watanabe, Daisuke, Hotta, Saori, Kimura, Chiharu, Sugino, Takashi

Year:

2007

Language:

english

File:

PDF, 967 KB

english, 2007

33

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Improvement of Anode Oxidation Reaction of a Fuel Cell using Ammonium Formate with Pt-Pd Catalysts

Aoki, Hidemitsu, Nitta, Tomohiro, Kuwabata, Susumu, Kimura, Chiharu, Sugino, Takashi

Year:

2008

File:

PDF, 3.88 MB

2008

34

Effect of plasma treatment on interface property of BCN/GaN structure

Yoshiaki Shimada, Kentaro Chikamatsu, Chiharu Kimura, Hidemitsu Aoki, Takashi Sugino

Journal:

Applied Surface Science

Year:

2006

Language:

english

File:

PDF, 199 KB

english, 2006

35

Development of Environmentally Safe Remover for Cu/Low-k Devices

KOITO, Tatsuya, HIRANO, Keiji, IJI, Masatoshi, AOKI, Hidemitsu, KASAMA, Yoshiko

Journal:

Journal of The Surface Finishing Society of Japan

Year:

2005

File:

PDF, 761 KB

2005

36

Pathological Studies on the Endocrine Organs of the Spontaneously Hypertensive Rats

AOKI, Kyuzo, TANKAWA, Hidemitsu, FUJINAMI, Takao, MIYAZAKI, Akio, HASHIMOTO, Yoshiteru

Journal:

Japanese Heart Journal

Year:

1963

File:

PDF, 3.33 MB

1963

37

Low-temperature oxidation of SiC surfaces by supercritical water oxidation

Takashi Futatsuki, Taro Oe, Hidemitsu Aoki, Naoyoshi Komatsu, Chiharu Kimura, Takashi Sugino

Journal:

Applied Surface Science

Year:

2010

Language:

english

File:

PDF, 676 KB

english, 2010

38

Low-Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor at High Pressure

Futatsuki, Takashi, Oe, Taro, Aoki, Hidemitsu, Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2009

Language:

english

File:

PDF, 125 KB

english, 2009

39

Influence of Cu electroplating solutions on boron carbon nitride (BCN) film

Hidemitsu Aoki, Makoto Hara, Takuro Masuzumi, Motaharu K. Mazumder, Naoki Ooi, Daisuke Watanabe, Chiharu Kimura, Takashi Sugino

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 518 KB

english, 2009

40

Luminescence Characteristics and Annealing Effect of Tb-Doped AlBNO Films for Inorganic Electroluminescence Devices

Masumoto, Keiko, Semba, Akitoshi, Kimura, Chiharu, Taniguchi, Takashi, Watanabe, Kenji, Sakata, Takao, Aoki, Hidemitsu

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 630 KB

english, 2011

41

Effect of Magnetic Field on Permeability of Electroplated Permalloy for Microdevices

Kubo, Eitaro, Ooi, Naoki, Aoki, Hidemitsu, Watanabe, Daisuke, Jeong, Jong-Hyeon, Kimura, Chiharu, Sugino, Takashi

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 256 KB

english, 2010

42

Cleaning Technologies using Electrolytic Ionized Water and Analysis Technology of Fine Structures for Next Generation Device Manufacturing

Aoki, Hidemitsu, Yamasaki, Shinya, Nakamori, Masaharu, Aoto, Nahomi, Yamanaka, Koji, Imaoka, Takashi, Futatsuki, Takashi

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 1.22 MB

english, 1997

43

Improvement of anode oxidation reaction of a fuel cell using ammonium formate with Pt-Ir catalysis

Kazutoshi Ohyama, Takashi Sugino, Tomohiro Nitta, Chiharu Kimura, Hidemitsu Aoki

Journal:

Electrical Engineering in Japan

Year:

2011

Language:

english

File:

PDF, 656 KB

english, 2011

44

Amino acid sensing by impedance of porous monolith-type ion exchanger

Hidemitsu Aoki, Kazuki Miyano, Saori Hotta, Daisaku Yano, Kazuhiko Sano, Koji Yamanaka, Chiharu Kimura, Takashi Sugino

Journal:

Electrochimica Acta

Year:

2008

Language:

english

File:

PDF, 576 KB

english, 2008

45

Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors

Naoyoshi Komatsu, Hirotaka Tanaka, Hidemitsu Aoki, Keiko Masumoto, Masatomo Honjo, Chiharu Kimura, Yukihiko Okumura, Takashi Sugino

Journal:

Applied Surface Science

Year:

2010

Language:

english

File:

PDF, 640 KB

english, 2010

46

Synthesis and Characterization of Tb-doped AlBNO Films for Electroluminescence Devices

Masumoto, Keiko, Iwano, Yuta, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi

Journal:

MRS Proceedings

Year:

2009

Language:

english

File:

PDF, 158 KB

english, 2009

47

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Formation and Characterization of P(VDF-TeFE) Films Using Sol-Gel Methods for Application to Micro-Generators

Jeong, Jong-Hyeon, Kimura, Chiharu, Aoki, Hidemitsu, Okuyama, Masanori, Sugino, Takashi

Year:

2009

Language:

english

File:

PDF, 1.39 MB

english, 2009

48

[IEEE 2009 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA) - Hsinchu, Taiwan (2009.04.27-2009.04.29)] 2009 International Symposium on VLSI Technology, Systems, and Applications - Boron carbon nitride film containing hydrogen for 2nm node low-k interconnection

Aoki, Hidemitsu, Takuroh Masuzumi,, Makoto Hara,, Watanabe, Daisuke, Kimura, Chiharu, Sugino, Takashi

Year:

2009

File:

PDF, 256 KB

2009

49

The Study about the Control of Defect Factors to Improve Properties of P(VDF-TeFE) Thin Film

Jeong, Jong-Hyeon, Terashima, Daiki, Kimura, Chiharu, Aoki, Hidemitsu

Journal:

MRS Proceedings

Year:

2011

Language:

english

File:

PDF, 273 KB

english, 2011

50

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - High Rate Etching of Ru and TaN using Electrochemical Reaction for Bevel Cleaning

Aoki, Hidemitsu, Watanabe, Daisuke, Ooi, Naoki, Jeong, Jong-Hyeon, Kimura, Chiharu, Sugino, Takashi

Year:

2009

Language:

english

File:

PDF, 498 KB

english, 2009

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